Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12752080
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Filing Dt:
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03/31/2010
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Publication #:
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Pub Dt:
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10/06/2011
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Inventor:
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SHIFANG LI
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Title:
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METHOD OF OPTICAL METROLOGY OPTIMIZATION USING RAY TRACING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| TOKYO ELECTRON U.S. HOLDINGS, INC. |
| 4350 W. CHANDLER BLVD, SUITE 10 |
| CHANDLER, AZ 85226 |
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