Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/02/2015
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Application #:
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13044891
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Filing Dt:
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03/10/2011
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Publication #:
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Pub Dt:
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10/13/2011
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Inventors:
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Hyun-Su JUN, Ki-Sang Kim, Seung-Heong Lee, Jong-Bum Kim, In-Joong Kim, Min-Woung Choi
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Title:
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PLASMA PROCESSING METHOD OF SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 416 MAETAN-DONG, YEONGTONG-GU |
| SUWON-SI, GYEONGGI-DO, KOREA, REPUBLIC OF |
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| STANZIONE & KIM, LLP |
| 919 18TH STREET, N.W. |
| SUITE 440 |
| WASHINGTON, DC 20006 |
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