Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12855206
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Filing Dt:
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08/12/2010
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Publication #:
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Pub Dt:
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10/20/2011
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Inventors:
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Masami Kamibayashi, Masahito Mori, Hiroyuki Kobayashi, Keizo Suzuki, Naoyuki Kofuji
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, |
| TOKYO, JAPAN |
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| ANTONELLI, TERRY, STOUT & KRAUS, LLP |
| 1300 NORTH 17TH STREET |
| SUITE 1800 |
| ARLINGTON, VA 22209 |
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