Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13130595
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Filing Dt:
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06/24/2011
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Publication #:
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Pub Dt:
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10/20/2011
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Inventors:
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Takahiro Nanba, Naoki Morimoto, Masahiko Ishida, Kouji Sogabe
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Title:
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METHOD OF MANUFACTURING CHUCK PLATE FOR USE IN ELECTROSTATIC CHUCK
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2500, HAGISONO, CHIGASAKI-SHI |
| KANAGAWA, JAPAN 253-8543 |
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| TOMOKO NAKAJIMA |
| 127 S. PEYTON STREET |
| SUITE 210 |
| ALEXANDRIA, VA 22314 |
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