Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/14/2015
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Application #:
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13095720
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Filing Dt:
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04/27/2011
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Publication #:
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Pub Dt:
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11/03/2011
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Inventors:
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Chien-Teh Kao, Hyman W.H. Lam, Mei Chang, David T. Or, Nicholas R. Denny, Xiaoxiong Yuan
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Title:
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PROCESS CHAMBER LID DESIGN WITH BUILT-IN PLASMA SOURCE FOR SHORT LIFETIME SPECIES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| B. TODD PATTERSON |
| PATTERSON & SHERIDAN, LLP |
| 3040 POST OAK BLVD., SUITE 1500 |
| HOUSTON, TX 77056 |
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