Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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03/22/2016
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Application #:
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12891738
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Filing Dt:
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09/27/2010
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Publication #:
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Pub Dt:
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11/17/2011
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Inventors:
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CHUN CHI CHEN, Sai Hung Lam, Wei Zhu, Chin Yu Chen
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Title:
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APPARATUS AND METHOD FOR CALIBRATING LITHOGRAPHY PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 18 ZHANG JIANG RD., PUDONG NEW AREA |
| SHANGHAI, CHINA 201203 |
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| KILPATRICK TOWNSEND & STOCKTON LLP |
| TWO EMBARCADERO CENTER |
| EIGHTH FLOOR |
| SAN FRANCISCO, CA 94111-3834 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE DATE OF EXECUTION (DOC DATE) OF INVENTOR CHUN CHI CHEN PREVIOUSLY RECORDED ON REEL 030562 FRAME 0335. ASSIGNOR(S) HEREBY CONFIRMS THE DATE OF EXECUTION (DOC DATE) OF INVENTOR CHUN CHI CHEN OF 12/24/2001.
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| 18 ZHANG JIANG RD., PUDONG NEW AREA |
| SHANGHAI, CHINA 201203 |
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| KILPATRICK TOWNSEND & STOCKTON LLP |
| TWO EMBARCADERO CENTER |
| EIGHTH FLOOR |
| SAN FRANCISCO, CA 94111-3834 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 18 ZHANG JIANG RD., PUDONG NEW AREA |
| SHANGHAI, CHINA 201203 |
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| 18 WEN CHANG ROAD, ECONOMIC-TECHNOLOGICAL DEVELOPMENT AREA |
| DAXING DISTRICT |
| BEIJING, CHINA 100176 |
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| KILPATRICK TOWNSEND & STOCKTON LLP |
| TWO EMBARCADERO CENTER |
| EIGHTH FLOOR |
| SAN FRANCISCO, CA 94111-3834 |
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