Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13051935
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Filing Dt:
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03/18/2011
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Publication #:
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Pub Dt:
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11/24/2011
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Inventor:
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Masato SAITO
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Title:
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ELECTRON BEAM DRAWING APPARATUS, ELECTRON BEAM DRAWING METHOD, SEMICONDUCTOR DEVICE MANUFACTURING MASK MANUFACTURING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING TEMPLATE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU, |
| TOKYO, JAPAN 105-8001 |
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| FINNEGAN HENDERSON ET AL. |
| 901 NEW YORK AVE., NW |
| WASHINGTON, DC 20001 |
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