Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12995579
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Filing Dt:
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02/07/2011
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Publication #:
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Pub Dt:
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12/22/2011
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Inventors:
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Katsushi Kishimoto, Yusuke Fukuoka, Nobuyuki Tanigawa
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Title:
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PLASMA PROCESSING APPARATUS, AND DEPOSITION METHOD AN ETCHING METHOD USING THE PLASMA PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 22-22, NAGAIKE-CHO |
| ABENO-KU |
| OSAKA-SHI, OSAKA, JAPAN 545-8522 |
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| NIXON & VANDERHYE PC |
| 901 N GLEBE RD. |
| 11TH FLOOR |
| ARLINGTON, VA 22203 |
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