Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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08/26/2014
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Application #:
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13160209
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Filing Dt:
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06/14/2011
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Publication #:
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Pub Dt:
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12/22/2011
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Inventors:
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Kunihiko Suzuki, Hideki Ito, Hidekazu Tsuchida, Masahiko Ito, Isaho Kamata
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Title:
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MANUFACTURING APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE AND CLEANING METHOD OF MANUFACTURING APPARATUS FOR SEMICONDUCTOR
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2068-3, OOOKA, |
| NUMAZU-SHI, SHIZUOKA-KEN,, JAPAN 410-8510 |
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| FINNEGAN, HENDERSON, FARABOW, GARRETT & |
| 901 NEW YORK AVENUE, NW |
| WASHINGTON, DC 20001-4413 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2068-3, OOKA |
| NUMAZU-SHI, SHIZUOKA-KEN, JAPAN 410-8510 |
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| 1-1, SHOWA-CHO |
| KARIYA-CITY, AICHI-PREF, JAPAN 448-8661 |
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| 1, TOYOTA-CHO |
| TOYOTA-SHI, AICHI-KEN, JAPAN 471-8571 |
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| RICHARD V. BURGUJIAN |
| 901 NEW YORK AVE, NW |
| WASHINGTON, DC 20001 |
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Assignment:
3
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2068-3, OOKA |
| NUMAZU-SHI, SHIZUOKA-KEN, JAPAN 410-8510 |
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| 1-1, SHOWA-CHO |
| KARIYA-CITY, AICHI-PREF, JAPAN 448-8661 |
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| 1, TOYOTA-CHO |
| TOYOTA-SHI, AICHI-KEN, JAPAN 471-8571 |
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| RICHARD V. BURGUJIAN |
| 901 NEW YORK AVE, NW |
| WASHINGTON, DC 20001 |
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