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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
NONE
Issue Dt:
Application #:
12829794
Filing Dt:
07/02/2010
Publication #:
Pub Dt:
01/05/2012
Inventors:
Timothy Miller, Vikram Singh, Christopher J. Leavitt, Ludo Godet
Title:
CONTROL APPARATUS FOR PLASMA IMMERSION ION IMPLANTATION OF A DIELECTRIC SUBSTRATE
Assignment: 1
Reel/Frame:
024745/0731Recorded: 07/27/2010Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
06/29/2010
Exec Dt:
07/22/2010
Exec Dt:
06/29/2010
Exec Dt:
06/29/2010
Assignee:
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondent:
SCOTT R. FABER
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE
35 DORY ROAD
GLOUCESTER, MA 01930
Assignment: 2
Reel/Frame:
026815/0425Recorded: 08/26/2011Pages: 7
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
08/16/2011
Exec Dt:
08/16/2011
Exec Dt:
08/25/2011
Exec Dt:
08/23/2011
Assignee:
35 DORY ROAD
GLOUCESTER, MASSACHUSETTS 01930
Correspondent:
SCOTT R. FABER, REG. NO. 48380
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATE
35 DORY ROAD
GLOUCESTER, MA 01930

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