Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13183582
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Filing Dt:
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07/15/2011
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Publication #:
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Pub Dt:
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01/19/2012
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Inventors:
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Atsushi ENDO, Kazumi KUBO, Satoshi MIZUNAGA
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Title:
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METHOD OF CLEANING A THIN FILM FORMING APPARATUS, THIN FILM FORMING METHOD, AND THIN FILM FORMING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| THE NATH LAW GROUP |
| 112 S. WEST STREET |
| ALEXANDRIA, VA 22314 |
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