Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13196439
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Filing Dt:
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08/02/2011
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Publication #:
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Pub Dt:
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03/08/2012
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Inventors:
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Akikazu TANIMOTO, Yutaka IKEDA, Kenichi SHIRAISHI, Ryo TANAKA, Shunji WATANABE
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Title:
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Cleaning method, device manufacturing method, cleaning substrate, liquid immersion member, liquid immersion exposure apparatus, and dummy substrate
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 12-1, YURAKUCHO 1-CHOME, |
| CHIYODA-KU, TOKYO 100-8331, JAPAN |
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| MARIO A. COSTANTINO |
| OLIFF & BERRIDGE, PLC |
| P.O. BOX 320850 |
| ALEXANDRIA, VA 22320-4850 |
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