Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/25/2015
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Application #:
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13320150
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Filing Dt:
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11/11/2011
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Publication #:
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Pub Dt:
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03/08/2012
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Inventors:
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Yuichiro Enomoto, Sou Kamimura, Shinji Tarutani
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Title:
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PATTERN FORMING METHOD, CHEMICAL AMPLIFICATION RESIST COMPOSITION AND RESIST FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 26-30, NISHIAZABU 2-CHOME |
| MINATO-KU |
| TOKYO, JAPAN |
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| SUGHRUE-265550 |
| 2100 PENNSYLVANIA AVE. NW |
| SUITE 800 |
| WASHINGTON, DC 20037-3213 |
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