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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
13229986
Filing Dt:
09/12/2011
Publication #:
Pub Dt:
03/15/2012
Inventor:
Yuichi Kawase
Title:
Charged-Particle Beam Lithographic Apparatus and Lithographic Method Therefor
Assignment: 1
Reel/Frame:
026907/0838Recorded: 09/14/2011Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
09/07/2011
Assignee:
1-2, MUSASHINO 3-CHOME, AKISHIMA
TOKYO, JAPAN 196-8558
Correspondent:
THE WEBB LAW FIRM
ONE GATEWAY CENTER
420 FT. DUQUESNE BLVD., STE 1200
PITTSBURGH, PA 15222

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