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Patent Assignment Abstract of Title
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Total Assignments: 2
Patent #:
NONE
Issue Dt:
Application #:
13078544
Filing Dt:
04/01/2011
Publication #:
20120062858
Pub Dt:
03/15/2012
Inventors:
Ryo TANAKA, Suguru KANAI, Kenichi SHIRAISHI, Shunji WATANABE, Takashi SHIBUYA
Title:
CLEANING METHOD, DEVICE MANUFACTURING METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING SYSTEM
Assignment: 1
Reel/Frame:
027003/0626Recorded: 09/30/2011Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TANAKA, RYO
Exec Dt:
08/29/2011
KANAI, SUGURU
Exec Dt:
08/31/2011
SHIRAISHI, KENICHI
Exec Dt:
09/06/2011
WATANABE, SHUNJI
Exec Dt:
09/08/2011
SHIBUYA, TAKASHI
Exec Dt:
09/12/2011
Assignee:
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME,
CHIYODA-KU, TOKYO 100-8331, JAPAN
Correspondent:
MARIO A. COSTANTINO
OLIFF & BERRIDGE, PLC
P.O. BOX 320850
ALEXANDRIA, VA 22320-4850
Assignment: 2
Reel/Frame:
027003/0830Recorded: 09/30/2011Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
TANAKA, RYO
Exec Dt:
08/29/2011
KANAI, SUGURU
Exec Dt:
08/31/2011
SHIRAISHI, KENICHI
Exec Dt:
09/06/2011
WATANABE, SHUNJI
Exec Dt:
09/08/2011
SHIBUYA, TAKASHI
Exec Dt:
09/12/2011
Assignee:
NIKON CORPORATION
12-1, YURAKUCHO 1-CHOME
CHIYODA-KU, TOKYO 100-8331, JAPAN
Correspondent:
MARIO A. COSTANTINO
OLIFF & BERRIDGE, PLC
P.O. BOX 320850
ALEXANDRIA, VA 22320-4850

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