Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13248567
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Filing Dt:
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09/29/2011
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Publication #:
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Pub Dt:
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03/29/2012
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Inventors:
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Dmitry Lubomirsky, Qiwei Liang, Soonam Park, Kien N. Chuc, Ellie Yieh
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Title:
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PROCESS CHAMBER FOR DIELECTRIC GAPFILL
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| EUGENE J. BERNARD |
| KILPATRICK TOWNSEND & STOCKTON LLP |
| TWO EMBARCADERO CENTER - 8TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE EXECUTION DATE OF ASSIGNOR SOONAM PARK FROM 06/27/2011 TO 06/27/2007 PREVIOUSLY RECORDED ON REEL 026996 FRAME 0676. ASSIGNOR(S) HEREBY CONFIRMS THE EXECUTION DATE OF ASSIGNOR SOONAM PARK TO 06/27/2007.
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| EUGENE J. BERNARD |
| KILPATRICK TOWNSEND & STOCKTON LLP |
| TWO EMBARCADERO CENTER - 8TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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