Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13072546
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Filing Dt:
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03/25/2011
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Publication #:
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Pub Dt:
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03/29/2012
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Inventors:
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Won B. Bang, Tien Fak Tan, Son M. Phi, Dmitry Lubomirsky
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Title:
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WAFER PROFILE MODIFICATION THROUGH HOT/COLD TEMPERATURE ZONES ON PEDESTAL FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| WILLIAM L. SHAFFER |
| KILPATRICK TOWNSEND & STOCKTON LLP |
| TWO EMBARCADERO CENTER, 8TH FLOOR |
| SAN FRANCISCO, CA 94111 |
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