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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
13276642
Filing Dt:
10/19/2011
Publication #:
Pub Dt:
04/19/2012
Inventors:
Taro Ikeda, Yuki Osada
Title:
MICROWAVE PLASMA SOURCE AND PLASMA PROCESSING APPARATUS
Assignment: 1
Reel/Frame:
027145/0422Recorded: 10/31/2011Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/24/2011
Exec Dt:
10/24/2011
Assignee:
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
PEARNE & GORDON LLP
1801 EAST 9TH STREET
SUITE 1200
CLEVELAND, OH 44114-3108

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