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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
02/13/2018
Application #:
13250906
Filing Dt:
09/30/2011
Publication #:
Pub Dt:
05/03/2012
Inventors:
NYI O. MYO, John S. Webb, Masato Ishii, Xuebin Li, Zhiyuan Ye, Ali Zojaji
Title:
PRE-HEAT RING DESIGNS TO INCREASE DEPOSITION UNIFORMITY AND SUBSTRATE THROUGHPUT
Assignment: 1
Reel/Frame:
027180/0703Recorded: 11/05/2011Pages: 4
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
10/10/2011
Exec Dt:
10/05/2011
Exec Dt:
10/07/2011
Exec Dt:
10/04/2011
Exec Dt:
10/04/2011
Exec Dt:
10/05/2011
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
PATTERSON & SHERIDAN, L.L.P.
3040 POST OAK BLVD, SUITE 1500
HOUSTON, TX 77056

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