Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13290801
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Filing Dt:
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11/07/2011
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Publication #:
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Pub Dt:
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05/10/2012
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Inventors:
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Tadashi Kitamura, Akio Ishikawa
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Title:
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Systems And Methods For Inspecting And Controlling Integrated Circuit Fabrication Using A Calibrated Lithography Simulator
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7F NK SHIMURASAKAUE BLDG. |
| 3-6-7 AZUSAWA, ITABASHI-KU |
| TOKYO, JAPAN 174-0051 |
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| LATHROP & GAGE LLP |
| 4845 PEARL EAST CIRCLE |
| SUITE 201 |
| BOULDER, CO 80301 |
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