Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/24/2015
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Application #:
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13322192
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Filing Dt:
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01/27/2012
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Publication #:
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Pub Dt:
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05/24/2012
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Inventors:
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Ryuichi Matsuda, Kazuto Yoshida, Yuichi Kawano
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Title:
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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 16-5, KONAN 2-CHOME, MINATO-KU |
| TOKYO, JAPAN 1088215 |
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| WESTERMAN, HATTORI, DANIELS & ADRIAN LLP |
| 1250 CONNECTICUT AVENUE NW, |
| SUITE 700 |
| WASHINGTON,, DC 20036 |
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