Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12949130
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Filing Dt:
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11/18/2010
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Publication #:
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Pub Dt:
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05/24/2012
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Inventors:
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Akimitsu Ebihara, Yi-Ping Hsin, Kunitomo Fukai, Hideyuki Hashimoto, Bausan Yuan
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Title:
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ISOLATION SYSTEM FOR AN OPTICAL ELEMENT OF AN EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 12-1, YURAKUCHO 1-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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| STEVEN G. ROEDER |
| 5560 CHELSEA AVENUE |
| LA JOLLA, CA 92037 |
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