Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/26/2015
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Application #:
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13246915
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Filing Dt:
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09/28/2011
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Publication #:
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Pub Dt:
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05/24/2012
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Inventors:
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Shin-ya MINEGISHI, Shin-ya Nakafuji, Satoru Murakami, Toru Kimura
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Title:
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METHOD FOR PATTERN FORMATION, METHOD AND COMPOSITION FOR RESIST UNDERLAYER FILM FORMATION, AND RESIST UNDERLAYER FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 9-2, HIGASHI-SHINBASHI 1-CHOME, MINATO-KU |
| TOKYO, JAPAN 105-8640 |
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| MASAYASU MORI |
| 918 PRINCE STREET |
| ALEXANDRIA, VA 22314 |
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