Patent Assignment Abstract of Title
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Total Assignments:
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Patent #:
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Issue Dt:
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01/24/2017
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Application #:
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13366829
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Filing Dt:
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02/06/2012
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Publication #:
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Pub Dt:
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05/31/2012
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Inventors:
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Tomoyuki MATSUYAMA, Naonori KITA
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Title:
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LIGHT SOURCE OPTIMIZING METHOD, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, PROGRAM, EXPOSURE APPARATUS, LITHOGRAPHY SYSTEM, LIGHT SOURCE EVALUATION METHOD, AND LIGHT SOURCE MODULATION METHOD
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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12-1, YURAKUCHO 1-CHOME, CHIYODA-KU |
TOKYO 100-8331, JAPAN |
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MARIO A. COSTANTINO |
OLIFF & BERRIDGE, PLC |
P.O. BOX 320850 |
ALEXANDRIA, VA 22320-4850 |
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