Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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01/10/2017
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Application #:
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13305139
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Filing Dt:
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11/28/2011
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Publication #:
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Pub Dt:
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05/31/2012
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Inventors:
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Akira Furuya, Takamitsu Kitamura
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Title:
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ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-33, KITAHAMA 4-CHOME, CHUO-KU |
| OSAKA, JAPAN 541-0041 |
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| WESTERMAN, HATTORI, DANIELS & ADRIAN LLP |
| 1250 CONNECTICUT AVENUE NW, |
| SUITE 700 |
| WASHINGTON,, DC 20036 |
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