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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
05/28/2013
Application #:
13369163
Filing Dt:
02/08/2012
Publication #:
Pub Dt:
06/07/2012
Inventors:
Marcel Francois HEERTJES, Wilhelmus Franciscus Johannes SIMONS et al
Title:
CONTROLLER FOR A POSITIONING DEVICE, METHOD FOR CONTROLLING A POSITIONING DEVICE, POSITIONING DEVICE, AND LITHOGRAPHIC APPARATUS PROVIDED WITH A POSITIONING DEVICE
Assignment: 1
Reel/Frame:
027678/0656Recorded: 02/09/2012Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/10/2009
Exec Dt:
02/10/2009
Exec Dt:
02/12/2009
Exec Dt:
02/06/2009
Assignee:
DE RUN 6501
VELDHOVEN, NETHERLANDS NL-5504 DR
Correspondent:
PILLSBURY WINTHROP SHAW PITTMAN, LLP
P.O. BOX 10500
MCLEAN, VA 22102

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