Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/11/2014
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Application #:
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13126671
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Filing Dt:
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12/14/2011
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Publication #:
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Pub Dt:
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06/14/2012
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Inventors:
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Tatsuya Yanagida, Osamu Wakabayashi
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Title:
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SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT, AND LASER APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6-1, OTEMACHI 2-CHOME, CHIYODA-KU, |
| TOKYO, JAPAN 100-0004 |
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| MCDERMOTT WILL & EMERY LLP |
| 600 THIRTEENTH STREET, N.W. |
| WASHINGTON, DC 20005-3096 |
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