Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13331123
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Filing Dt:
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12/20/2011
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Publication #:
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Pub Dt:
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06/21/2012
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Inventors:
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Masanao Fukuda, Yoshinori Imai, Shuhei Saido, Kenji Shirako, Takafumi Sasaki et al
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Title:
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SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SUBSTRATE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1, SOTOKANDA 4-CHOME |
| CHIYODA-KU, TOKYO, JAPAN 1018980 |
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| VOLPE AND KOENIG, P.C. |
| 30 SOUTH 17TH STREET, UNITED PLAZA |
| PHILADELPHIA, PA 19103 |
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