Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/06/2013
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Application #:
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13349355
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Filing Dt:
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01/12/2012
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Publication #:
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Pub Dt:
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07/12/2012
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Inventors:
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Masato MORIYA, Hideyuki HAYASHI, Tooru ABE
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Title:
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EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS, METHOD FOR CONTROLLING EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS, AND RECORDING MEDIUM WITH PROGRAM RECORDED THEREON
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-6-1 OTEMACHI, CHIYODA-KU, |
| TOKYO, JAPAN 100-0004 |
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| MCDERMOTT WILL & EMERY LLP |
| 600 13TH STREET, N.W. |
| WASHINGTON, DC 20005-3096 |
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