Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/17/2015
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Application #:
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13351653
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Filing Dt:
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01/17/2012
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Publication #:
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Pub Dt:
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07/19/2012
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Inventors:
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Jiro HIGASHIJIMA, Yosuke Hachiya, Kazuhiro Aiura, Norihiro Itoh, Yuki Ito, Naoki Shindo
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Title:
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LIQUID ARM CLEANING UNIT FOR SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-1 AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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| ABELMAN FRAYNE & SCHWAB/TEL HARRY K. AHN |
| 666 THIRD AVENUE |
| 10TH FLOOR |
| NEW YORK, NY 10017-5621 |
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