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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
13251663
Filing Dt:
10/03/2011
Publication #:
Pub Dt:
07/19/2012
Inventors:
Jang-Gyoo Yang, Matthew L. Miller, Xinglong Chen, Kien N. Chuc, Qiwei Liang et al
Title:
SEMICONDUCTOR PROCESSING SYSTEM AND METHODS USING CAPACITIVELY COUPLED PLASMA
Assignment: 1
Reel/Frame:
027314/0260Recorded: 12/01/2011Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/07/2011
Exec Dt:
11/15/2011
Exec Dt:
11/07/2011
Exec Dt:
11/07/2011
Exec Dt:
11/07/2011
Exec Dt:
11/07/2011
Exec Dt:
11/11/2011
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
EUGENE J. BERNARD
KILPATRICK TOWNSEND & STOCKTON LLP
TWO EMBARCADERO CENTER - 8TH FLOOR
SAN FRANCISCO, CA 94111

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