Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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04/22/2014
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Application #:
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13441639
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Filing Dt:
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04/06/2012
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Publication #:
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Pub Dt:
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08/02/2012
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Inventors:
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Igor V. Fomenkov, Alexander N. Bykanov
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Title:
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LASER PRODUCED PLASMA EUV LIGHT SOURCE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 17075 THORNMINT COURT |
| LEGAL DEPT. M/S 4-2D |
| SAN DIEGO, CALIFORNIA 92127-2413 |
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| JEFFREY J. BROOKS |
| 17075 THORNMINT COURT |
| LEGAL DEPT. M/S 4-2D |
| SAN DIEGO, CA 92127-2413 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 324 |
| VELDHOVEN, NETHERLANDS 5500 AH |
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| ASML NETHERLANDS B.V. |
| P.O. BOX 324 |
| VELDHOVEN, 5500 AH NETHERLANDS |
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