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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
08/19/2014
Application #:
13026232
Filing Dt:
02/12/2011
Publication #:
Pub Dt:
08/16/2012
Inventor:
Tetsuya Nishizuka
Title:
METHOD OF ETCHING FEATURES IN SILICON NITRIDE FILMS
Assignment: 1
Reel/Frame:
025799/0558Recorded: 02/12/2011Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
02/10/2011
Assignee:
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME
MINATO-KU, TOKYO, JAPAN 107-6325
Correspondent:
AUDUNN LUDVIKSSON
4350 W CHANDLER BLVD
SUITE 10
CHANDLER, AZ 85226

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