Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13399558
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Filing Dt:
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02/17/2012
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Publication #:
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Pub Dt:
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08/23/2012
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Inventors:
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Masaki Murobayashi, Takatomo Yamaguchi, Shuhei Saido, Yoshinori Imai, Kenji Shirako et al
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1, SOTOKANDA 4-CHOME |
| CHIYODA-KU |
| TOKYO, JAPAN 1018980 |
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| VOLPE AND KOENIG, P.C. |
| 30 SOUTH 17TH STREET |
| UNITED PLAZA |
| PHILADELPHIA, PA 19103 |
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