Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/16/2015
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Application #:
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13037270
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Filing Dt:
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02/28/2011
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Publication #:
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Pub Dt:
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08/30/2012
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Inventors:
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Akira Fujimura, Kazuyuki Hagiwara, Stephen F. Meier, Ingo Bork
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Title:
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METHOD AND SYSTEM FOR DESIGN OF ENHANCED EDGE SLOPE PATTERNS FOR CHARGED PARTICLE BEAM LITHOGRAPHY
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4040 MOORPARK AVENUE, #250 |
| SAN JOSE, CALIFORNIA 95117 |
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| THE MUELLER LAW OFFICE, P.C. |
| 12707 HIGH BLUFF DRIVE, SUITE 200 |
| SAN DIEGO, CA 92130 |
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