Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/17/2013
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Application #:
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13399096
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Filing Dt:
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02/17/2012
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Publication #:
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Pub Dt:
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08/30/2012
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Inventors:
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Kuen-Yu Tsai, Philip C.W. Ng, Pei-Lin Tien, Chun-Hung Liu
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Title:
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METHOD FOR COMPENSATING PROXIMITY EFFECTS OF PARTICLE BEAM LITHOGRAPHY PROCESSES
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| NO. 1, SEC. 4, ROOSEVELT ROAD., DA-AN DISTRICT |
| TAIPEI CITY, TAIWAN 10617 |
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| RABIN & BERDO, P.C. |
| 1101 14TH ST., N.W., SUITE 500 |
| WASHINGTON, DC 20005 |
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