Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/14/2017
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Application #:
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13417510
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Filing Dt:
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03/12/2012
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Publication #:
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Pub Dt:
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09/13/2012
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Inventors:
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Martin ROCKTAESCHEL, Hartmut ENKISCH, Franz-Josef STICKEL, Oliver NATT et al
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Title:
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MIRROR FOR USE IN A MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| RUDOLF-EBER-STRASSE 2 |
| OBERKOCHEN, GERMANY 73447 |
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| GEORGE F. LEHNIGK |
| 2100 PENNSYLVANIA AVE, NW |
| SUITE 800 |
| WASHINGTON, DC 20035 |
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