Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13422425
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Filing Dt:
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03/16/2012
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Publication #:
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Pub Dt:
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09/20/2012
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Inventors:
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Michael Jackson, Song-Moon Suh, Arvind Sundarajjan, Murali K. Narasimhan et al
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Title:
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IN-SITU CLEAN PROCESS FOR METAL DEPOSITION CHAMBERS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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PATTERSON & SHERIDAN, LLP - - APPM/TX |
595 SHREWSBURY AVENUE |
SUITE 100 |
SHREWSBURY, NJ 07702 |
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05/22/2024 07:36 AM
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