Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/10/2014
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Application #:
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13470800
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Filing Dt:
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05/14/2012
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Publication #:
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Pub Dt:
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10/25/2012
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Inventors:
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Nobuaki NAKASHIMA, Yoshiki ORIMOTO
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Title:
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TANTALUM SPUTTERING TARGET AND METHOD FOR MANUFACTURING THE SAME, AND METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN 105-8001 |
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| 8, SHINSUGITA-CHO, ISOGO-KU |
| YOKOHAMA-SHI, KANAGAWA, JAPAN 235-8522 |
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| PAVAN K. AGARWAL |
| FOLEY & LARDNER LLP SUITE 500 |
| 3000 K STREET, N.W. |
| WASHINGTON, DC 20007-5143 |
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