Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13398500
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Filing Dt:
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02/16/2012
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Publication #:
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Pub Dt:
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11/08/2012
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Inventors:
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Paul K. Chu, Liuhe Li
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Title:
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APPARATUS AND METHOD FOR FOCUSED ELECTRIC FIELD ENHANCED PLASMA-BASED ION IMPLANTATION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| TAT CHEE AVENUE, KOWLOON TONG, KOWLOON |
| HONG KONG, CHINA |
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| PETER J. MCANDREWS |
| 500 W. MADISON STREET |
| 34TH FLOOR |
| CHICAGO, IL 60661 |
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