Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/03/2015
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Application #:
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13512099
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Filing Dt:
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05/25/2012
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Publication #:
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Pub Dt:
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11/08/2012
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Inventors:
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Masaaki Takasuka, Masatoshi Echigo, Yu Okada
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Title:
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CYCLIC COMPOUND, PRODUCTION PROCESS THEREOF, RADIATION-SENSITIVE COMPOSITION AND RESIST PATTERN FORMATION METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 5-2, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8324 |
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| FITCH, EVEN, TABIN & FLANNERY |
| 120 S. LASALLE ST. |
| SUITE 1600 |
| CHICAGO, IL 60603-3406 |
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