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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/25/2014
Application #:
13104874
Filing Dt:
05/10/2011
Publication #:
Pub Dt:
11/15/2012
Inventors:
Vaibhaw Vishal, Mei Sun
Title:
HEAT SHIELD MODULE FOR SUBSTRATE-LIKE METROLOGY DEVICE
Assignment: 1
Reel/Frame:
026255/0676Recorded: 05/10/2011Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/10/2011
Exec Dt:
05/10/2011
Assignee:
1 TECHNOLOGY DRIVE
MILPITAS, CALIFORNIA 95035
Correspondent:
JOSHUA D. ISENBERG
809 CORPORATE WAY
FREMONT, CA 94539

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