Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/02/2016
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Application #:
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13526391
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Filing Dt:
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06/18/2012
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Publication #:
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Pub Dt:
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12/13/2012
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Inventors:
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Rajinder Dhindsa, Eric Hudson, Alexei Marakhtanov, Andreas Fischer
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Title:
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CAPACITIVELY-COUPLED PLASMA PROCESSING SYSTEM HAVING A PLASMA PROCESSING CHAMBER FOR PROCESSING A SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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4650 CUSHING PARKWAY |
FREMONT, CALIFORNIA 94538 |
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IPSG, P.C. |
P.O. BOX 700640 |
SAN JOSE, CA 95170 |
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