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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
13190985
Filing Dt:
07/26/2011
Publication #:
Pub Dt:
01/17/2013
Inventors:
CANFENG LAI, DAVID E. ABERLE, MICHAEL P. KAMP, HENRY BARANDICA, MARTIN A. HILKENE et al
Title:
METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRATE PROCESSING SYSTEMS
Assignment: 1
Reel/Frame:
027302/0848Recorded: 11/30/2011Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/28/2011
Exec Dt:
08/04/2011
Exec Dt:
08/10/2011
Exec Dt:
07/28/2011
Exec Dt:
08/03/2011
Exec Dt:
08/11/2011
Exec Dt:
07/28/2011
Exec Dt:
08/03/2011
Exec Dt:
07/28/2011
Exec Dt:
11/12/2011
Assignee:
3050 BOWERS AVENUE
SANTA CLARA, CALIFORNIA 95054
Correspondent:
ALAN TABOADA
1030 BROAD STREET
SUITE 203
SHREWSBURY, NJ 07702

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