Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13190985
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Filing Dt:
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07/26/2011
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Publication #:
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Pub Dt:
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01/17/2013
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Inventors:
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CANFENG LAI, DAVID E. ABERLE, MICHAEL P. KAMP, HENRY BARANDICA, MARTIN A. HILKENE et al
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Title:
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METHODS AND APPARATUS FOR CONTROLLING POWER DISTRIBUTION IN SUBSTRATE PROCESSING SYSTEMS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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ALAN TABOADA |
1030 BROAD STREET |
SUITE 203 |
SHREWSBURY, NJ 07702 |
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04/29/2024 07:59 PM
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