Patent Assignment Abstract of Title
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Total Assignments:
3
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Patent #:
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Issue Dt:
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01/05/2016
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Application #:
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13564427
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Filing Dt:
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08/01/2012
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Publication #:
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Pub Dt:
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02/07/2013
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Inventors:
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Zhongdu Liu, Gerald Zheyao Yin
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Title:
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CAPACITIVE-COUPLED PLASMA PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 188 TAIHUA ROAD |
| JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA), PUDONG |
| SHANGHAI, CHINA 201201 |
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| BURT MAGEN |
| 575 MARKET STREET, SUITE 2500 |
| SAN FRANCISCO, CA 94105 |
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Assignment:
2
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CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME PREVIOUSLY RECORDED AT REEL: 028701 FRAME: 0685. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
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| 188 TAIHUA ROAD |
| JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA), PUDONG |
| SHANGHAI, CHINA 201201 |
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| LARRY E. VIERRA |
| 575 MARKET STREET, SUITE 3750 |
| SAN FRANCISCO, CA 94105 |
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Assignment:
3
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 188 TAIHUA ROAD JINQIAO EXPORT PROCESSING ZONE (SOUTH AREA) |
| SHANGHAI, 201201 PUDONG, CHINA |
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| DANIEL M. GURFINKEL |
| DENNEMEYER & ASSOCIATES, LLC. |
| 2 NORTH RIVERSIDE PLAZA, SUITE 1500 |
| CHICAGO, IL 60606 |
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