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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
13668367
Filing Dt:
11/05/2012
Publication #:
Pub Dt:
03/14/2013
Inventors:
Hirokazu UDEA, Tetsuya NISHIZUKA, Toshihisa NOZAWA, Takaaki MATSUOKA
Title:
PLASMA PROCESSING METHOD
Assignment: 1
Reel/Frame:
029381/0342Recorded: 11/30/2012Pages: 8
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
11/20/2012
Exec Dt:
11/19/2012
Exec Dt:
11/20/2012
Exec Dt:
11/22/2012
Assignee:
3-1, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN 107-6325
Correspondent:
CANTOR COLBURN LLP
20 CHURCH STREET
22ND FLOOR
HARTFORD, CT 06103

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