Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/27/2015
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Application #:
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13617783
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Filing Dt:
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09/14/2012
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Publication #:
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Pub Dt:
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03/21/2013
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Inventors:
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Shinji YASHIMA, Atsushi UMEKAWA
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Title:
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SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-1, SOTOKANDA 4-CHOME, |
| CHIYODA-KU, TOKYO 1018980, JAPAN |
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| WILLIAM P. BERRIDGE |
| OLIFF & BERRIDGE, PLC |
| P.O. BOX 320850 |
| ALEXANDRIA, VA 22320-4850 |
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Assignment:
2
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CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
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| 3-4 KANDA-KAJICHO, CHIYODA-KU |
| TOKYO, JAPAN |
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| BRUNDIDGE & STANGER, P.C. |
| 1925 BALLENGER AVENUE, SUITE 560 |
| ALEXANDRIA, VA 22314 |
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