Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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NONE
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Issue Dt:
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Application #:
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13389242
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Filing Dt:
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12/03/2012
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Publication #:
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Pub Dt:
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03/28/2013
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Inventors:
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Katsuko Higashino, Kazutaka Yanagita
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Title:
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METAL NITRIDE CONTAINING FILM DEPOSITION USING COMBINATION OF AMINO-METAL AND HALOGENATED METAL PRECURSORS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 75, QUAI D'ORSAY |
| PARIS, FRANCE F-75007 |
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| AMERICAN AIR LIQUIDE, INC. IP DEPT. |
| 2700 POST OAK BOULEVARD |
| SUITE 1800 |
| HOUSTON, TX 77056 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 75 QUAI D'ORSAY |
| PARIS, FRANCE F-75007 |
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| AMERICAN AIR LIQUIDE, INC. IP DEPT. |
| 2700 POST OAK BOULEVARD |
| SUITE 1800 |
| HOUSTON, TX 77056 |
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