Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/15/2016
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Application #:
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13630901
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Filing Dt:
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09/28/2012
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Publication #:
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Pub Dt:
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04/11/2013
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Inventors:
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Qunhua Wang, Weijie Wang, Young Jin Choi, Seon-Mee Cho, Yi Cui, Soo Young Choi et al
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Title:
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METHODS FOR DEPOSITING A SILICON CONTAINING LAYER WITH ARGON GAS DILUTION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| PATTERSON & SHERIDAN, LLP |
| 595 SHREWSBURY AVENUE |
| SUITE 100 |
| SHREWSBURY, NJ 07702 |
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