Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/25/2016
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Application #:
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13703190
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Filing Dt:
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12/10/2012
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Publication #:
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Pub Dt:
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04/18/2013
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Inventors:
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Stefan Muthmann, Aad Gordijn, Reinhard Carius, Markus Huelsbeck, Dzmitry Hrunski
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Title:
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ELECTRODE FOR PRODUCING A PLASMA, PLASMA CHAMBER HAVING SAID ELECTRODE, AND METHOD FOR ANALYZING OR PROCESSING A LAYER OR THE PLASMA IN SITU
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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FACHBEREICH PATENTE |
JUELICH, GERMANY 52425 |
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JORDAN AND HAMBURG LLP |
122 EAST 42ND STREET |
SUITE 4000 |
NEW YORK, NY 10168 |
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